Servicing - complete inventory to support customer requirements
Support - Field Service department with over 60 years of
- Service Contracts - tailored to specific customer needs
System Sales - Refurbishment - Brokerage
Repeaters - GCA 3696 mask-making systems with many options
Generators - GCA 3000/3600/3600F - Create your own
- Wafer Steppers - GCA 4800, 6000 & 8000 series, ALS-200, & AutoStep
- LD-32 Exposure System
Probe Mask Generator
- 300mm Wafer Stepper - Alpha-300
- Large Bed Scale Generator
PC Controller Upgrade
As support for the DEC system controllers dissolved when the company
closed their doors, and seeing computer technology jumping by leaps
we saw the need to keep the GCA system controller current with this
pace, so we
developed a direct replacement controller to seamlessly handle the
operation of the GCA Wafer Stepper.
As a direct replacement, our upgrade utilizes a Strobe
Data Pentium-class computer to operate a sophisticated interface
board that utilizes a proprietary
DEC chipset to communicate directly with the original GCA operating
system, which RZE has formatted to reside on the PC hard drive. Integrated
this new controller is a Q-Bus backplane, which allows the original
boards to be installed, keeping communication to the intended subsystems
Our purpose for developing this was to be able to have current computer
parts easily accessible in case of malfunction (i.e.: hard drive/floppy
drive/pc power supply, etc.), although the reliability of these units
has been superb - we have not had one failure in the field since
our first installation in 1996, with 30+ installations in the USA
This installation includes
all hardware for mounting of an additional flat-screen PC monitor
and a keyboard replacement. The original hybrid monitor becomes
a dedicated overlay alignment screen. If the condition of this
monitor is in question, please see our CCD/ Monitor Upgrade below.
Metrology Subsystem Computer Upgrade
In a similar need for technological improvement, we instituted bringing
the metrology computer up-to-date with Pentium-class processing and an updated
version of the original metrology software to allow for operation with the
CCD / Monitor Overlay System Upgrade
This upgrade replaces older camera systems to a CCD version, and also upgrades
the monitor with a new tube and electronics for maximizing visual ability
for improved overlay accuracy.
Substrate Handling Options
Laser Transducer Replacement
The desire to work with various substrate materials, sizes,
and thickness is as unique as there are customers. This desire takes the
user into conditions
that the original system software was not designed for, so some creative
methodology is required in operating with these variations.
In handling these
requests, we have developed a couple of methods for working with different
sizes and pieces.
The Paddle system allows you to have different size paddles
that mate to a base unit installed onto the wafer stage. As this is a 2 piece
once the base is installed, different paddles are configured and created
to allow loading of different size & thickness wafers, including pieces.
The use of a paddle system does terminate the use of the Automatic Wafer
Handler, so you will be manually loading your substrates.
The Carrier system
is a carrier wafer, made of silicon or ceramic, which has a manufactured
pocket to hold a specific size/thickness wafer. This carrier
(pocket wafer) can be loaded into the Automatic Wafer Handler as a regular
wafer and loaded automatically onto the stage.
In order to handle the variety
of substrates, a plan of substrate usage is necessary in order to calculate
the required paddle/carrier thickness
measurements for feasibility and manufacturing.
As HP no longer manufactures or repairs the HP 5501 laser transducers, we
have a connection with a Laser manufacturer who makes a greatly improved
direct replacement for this unit. It can utilize the existing connections,
or can draw its power from an independent power supply, reducing the power
load on the GCA chassis supply, giving it longer life. This also allows you
to plug the laser into a separate circuit so that the laser head stays active
during system shutdowns, prolonging the laser life from multiple on/off cycles.